| World Position | 3D coordinates of the optical element's position |
| Total Width | Width of the optical element |
| Total Length | Length of the optical element |
| Total Height | Height of the optical element |
| Grazing Incidence Angle | Angle of incidence for grazing rays |
| Arm Length | Length of the arm of the optical element |
| Entrance Arm Length | Length of the entrance arm |
| Exit Arm Length | Length of the exit arm |
| Entrance Arm Length (Mer) | Meridional entrance arm length |
| Exit Arm Length (Mer) | Meridional exit arm length |
| Entrance Arm Length (Sag) | Sagittal entrance arm length |
| Exit Arm Length (Sag) | Sagittal exit arm length |
| Central Beamstop | Stop placed in the center of the beam |
| Total Width Stop | Width of the beamstop |
| Total Height Stop | Height of the beamstop |
| Opening Width | Width of the optical element opening |
| Opening Height | Height of the optical element opening |
| Opening Shape | Shape of the optical element opening (e.g., rectangle, circle) |
| Grating Mount | -- |
| Radius | Radius of curvature for curved surfaces |
| Design Energy | Target design energy for the optical element |
| Line Density | -- |
| Order of Diffraction | Diffraction order for grating elements |
| Design Energy Mounting | -- |
| Design Order of Diffraction | -- |
| Design Alpha Angle | -- |
| Design Beta Angle | -- |
| Short Radius | Short radius for elliptical elements |
| Long Radius | Long radius for elliptical elements |
| Fresnel Z Offset | -- |
| Bending Radius Direction | -- |
| Parameter A11 | -- |
| Design Grazing Inc Angle | Grazing incidence angle in design |
| Long Half Axis A | Long half-axis for elliptical elements |
| Short Half Axis B | Short half-axis for elliptical elements |
| Figure Rotation | -- |
| Distance Preceding | Distance from preceding element |
| Misalignment Coordinate System | Coordinate system for misalignment |
| Reflectivity Type | Type of reflectivity used |
| Material Substrate | Material of the substrate |
| Geometrical Shape | Shape of the optical element |
| Image Type | Type of image plane |
| Azimuthal Angle | Azimuthal angle of rotation |
| Additional Order | -- |
| Slope Error | Slope error for reflecting surfaces |
| Slope Error Sag | Sagittal slope error |
| Slope Error Mer | Meridional slope error |
| Thermal Distortion Amp | Amplitude of thermal distortion |
| Thermal Distortion Sigma X | Sigma in X for thermal distortion |
| Thermal Distortion Sigma Z | Sigma in Z for thermal distortion |
| Cylindrical Bowing Amp | Amplitude of cylindrical bowing |
| Cylindrical Bowing Radius | Radius for cylindrical bowing |
| VLS Parameter | -- |
| Reflectivity Type | Type of reflectivity coating |
| Material Substrate | Substrate material for reflecting surfaces |
| Roughness Substrate | Surface roughness of the substrate |
| Density Substrate | Density of the substrate material |
| Surface Coating | Coating material for the optical surface |
| Coating File | External file for custom coating |
| Number Layer | Number of layers in multilayer coatings |
| Material Coating 1 | Material of the first coating layer |
| Thickness Coating 1 | Thickness of the first coating layer |
| Roughness Coating 1 | Roughness of the first coating layer |
| Density Coating 1 | Density of the first coating layer |
| Material Coating 2 | Material of the second coating layer |
| Thickness Coating 2 | Thickness of the second coating layer |
| Roughness Coating 2 | Roughness of the second coating layer |
| Density Coating 2 | Density of the second coating layer |
| Material Top Layer | Material of the top layer coating |
| Thickness Top Layer | Thickness of the top layer coating |
| Roughness Top Layer | Roughness of the top layer coating |
| Density Top Layer | Density of the top layer coating |
| Lattice Spacing × 2 | Twice the lattice spacing (2d) of the crystal (in nm) |
| Unit Cell Volume | Volume of the crystal's unit cell (in nm³) |
| Structure Factor F₀ | Real and imaginary parts of the forward scattering factor |
| Structure Factor F_H | Real and imaginary parts of the Bragg-reflected structure factor |
| Structure Factor F_H̄ | Real and imaginary parts of the conjugate reflected factor |
| Offset Angle α | Crystal surface tilt relative to atomic planes (in radians) |